Screen printed PZT/PZT thick film bimorph MEMS cantilever device for vibration energy harvesting

Author:

Xu R.,Lei A.,Dahl-Petersen C.,Hansen K.,Guizzetti M.,Birkelund K.,Thomsen E.V.,Hansen O.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Small-scale energy harvesting through thermoelectric, vibration, and radiofrequency power conversion;Hudak;Journal of Applied Physics,2008

2. Energy harvesting vibration sources for microsystems applications;Beeby;Measurement Science and Technology,2006

3. Powering MEMS portable devices—a review of nonregenerative and regenerative power supply systems with special emphasis on piezoelectric energy harvesting systems;C.-Chennault;Smart Materials and Structures,2008

4. A comparison between several vibration powered piezoelectric generators for standalone systems;Lefeuvre;Sensors and Actuators A,2006

5. Fabrication and performance of MEMS-based piezoelectric power generator for vibration energy harvesting;Fang;Microelectronics Journal,2006

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