Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor-Reference-Cited by-同舟云学术

Microfabrication of a variable range and multi-directionally sensitive thermal flow sensor

Published:2014-12 Issue: Volume:220 Page:159-167
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yarali Milad,Khanna Sanjeev K.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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4. Development of a micro-thermal flow sensor with thin-film thermocouples;Kim;J. Micromech. Microeng.,2006

5. A 2D thermal flow sensor with sub-mW power consumption;Cubukcu;Sens. Actuators A,2010

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