Inelastic deformation of bilayer microcantilevers with nanoscale coating-Reference-Cited by-同舟云学术

Inelastic deformation of bilayer microcantilevers with nanoscale coating

Published:2011-07 Issue:1 Volume:168 Page:1-9
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lin I.-Kuan,Zhang Xin,Zhang Yanhang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference40 articles.

1. IR imaging using a cantilever-based focal plane array fabricated by deep reactive ion etching technique;Wang;Applied Physics Letters,2007

2. Performance of uncooled microcantilever thermal detectors;Datskos,2005

3. Asymmetric dielectric trilayer cantilever probe for calorimetric high-frequency field imaging;Lee;Journal of Microelectromechanical Systems,2007

4. Progress towards an uncooled IR imager with 5mK NETD;Amantea;Proceedings of SPIE,1998

5. Uncooled infrared imaging using bimaterial microcantilever arrays;Grbovic;Applied Physics Letters,2006

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of Deposition Temperature on Long-Term Residual Stress Evolution of Au Films;Materials;2023-05-10

2. Effect of Pulsed Laser Irradiation on Microstructure and Evolution of Residual Stress for Gold Film;Advanced Engineering Materials;2022-11-09

3. Length effect on the plastic deformation of SiO2 microcantilevers;Materials Science in Semiconductor Processing;2022-09

4. Effect of bimaterial microcantilever physical dimensions on photothermal sensing characteristics;Sensors and Actuators A: Physical;2021-11

5. Kirigami metamaterials for reconfigurable toroidal circular dichroism;NPG Asia Materials;2018-09