Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference27 articles.
1. Silicon torsional scanning mirror;Peterson;IBM J. Res. Dev,1980
2. Surface-micromachined microoptical elements and systems;Muller;Proc. IEEE,1998
3. J. Kranert, C. Deter, T. Gessner, W. Dotzel, Laser display technology, in: IEEE Proceedings of the 11th International Workshop on MEMS, 1998, pp. 99–104.
4. Optical raster-scanning displays based on surface-micromachined polysilicon mirrors;Hagelin;IEEE J. Select. Top. Quant. Electron,1999
5. Silicon-micromachined scanning confocal optical microscope;Dicksheets;J. MEMS,1998
Cited by
22 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献