An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications-Reference-Cited by-同舟云学术

An electromagnetically actuated micromirror with precise angle control for harsh environment optical switching applications

Published:2014-02 Issue: Volume:206 Page:1-9
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Tseng Victor Farm-Guoo,Li Jiping,Zhang Xiaoyang,Ding Jinling,Chen Qiao,Xie Huikai

Funder

National Science Foundation

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Magnetic materials for MEMS applications;Gibbs;J. Phys. D: Appl. Phys.,2004

2. The case for magnetically driven microactuators;Busch-Vishniac;Sens. Actuators A,1992

3. An energy-based design criterion for magnetic microactuators;Nami;J. Micromech. Microeng.,1996

4. Magnetic induction machines integrated into bulk-micromachined silicon;Arnold;J. Microelectromech. Syst.,2006

5. Numerical simulation and test of a UV-LIGA-fabricated electromagnetic micro-relay for power applications;Williams;Sens. Actuators A,2005

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