Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane-Reference-Cited by-同舟云学术

Tuning the sensing range and sensitivity of three axes tactile sensors using the polymer composite membrane

Published:2008-07 Issue: Volume:145-146 Page:14-22
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wen Chih-Chieh,Fang Weileun

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. 3-Axes flexible tactile sensor fabricated by Si micromachining and packaging technology;Kim,2006

2. A micromachined active tactile sensor for hardness detection;Hasegawa;Sens. Actuators A,2004

3. An active sensor for detecting mechanical characteristics of contacted objects;Hasegawa;J. Micromech. Microeng.,2006

4. Silicon smart tactile image sensor with pneumatically swollen single diaphragm structure;Takao,2006

5. A Highly sensitive CMOS-MEMS capacitive tactile sensor;Ko,2006

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