Author:
Aydın Eren,Gökçe Furkan,Kangül Mustafa,Zorlu Özge,Külah Haluk
Funder
The Scientific and Technological Research Council of Turkey
Ministry of Development, the Republic of Turkey
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference40 articles.
1. A CMOS–MEMS RF-tunable bandpass filter based on two high- $Q$ 22-mhz polysilicon clamped-clamped beam resonators;Lopez;IEEE Electron Device Lett.,2009
2. An in-plane high-sensitivity, low-noise micro-g silicon accelerometer;Chae;Sixt. Annu. Int. Conf. Micro Electro Mech. Syst.,2003
3. Epitaxially encapsulated resonant accelerometer with an on-chip micro-oven, in: 2017 19th Int;Shin;Conf. Solid-State Sensors, Actuators Microsystems, IEEE,2017
4. Surface-micromachined resonant accelerometer;Roessig;Proc. Int. Solid State Sensors Actuators Conf. (Transducers’ 97), IEEE,1997
5. An SOI-MEMS tuning fork gyroscope with linearly coupled drive mechanism;Azgin;2007 IEEE 20th Int. Conf. Micro Electro Mech. Syst., IEEE,2007
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