An integrated flexible temperature and tactile sensing array using PI-copper films

Author:

Yang Y.-J.,Cheng M.-Y.,Chang W.-Y.,Tsao L.-C.,Yang S.-A.,Shih W.-P.,Chang F.-Y.,Chang S.-H.,Fan K.-C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference19 articles.

1. A traction stress sensor array for use in high-resolution robotic tactile imaging;Kane;J. Microelectromech. Syst.,2000

2. A silicon-based shear force sensor: development and characterization;Wang;Sens. Actuators A,2000

3. Development of polyimide flexible tactile sensor skin;Engel;J. Micromech. Microeng.,2003

4. A flexible MEMS technology and its first application to shear stress sensor skin;Jiang;Proc. IEEE MEMS’97,1997

5. A polymer-based flexible tactile sensor for normal and shear load detection;Hwang;Proc. IEEE MEMS’06,2006

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