Fabrication of a high frequency piezoelectric microvalve-Reference-Cited by-同舟云学术

Fabrication of a high frequency piezoelectric microvalve

Published:2004-03 Issue:1 Volume:111 Page:51-56
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li H.Q,Roberts D.C,Steyn J.L,Turner K.T,Yaglioglu O,Hagood N.W,Spearing S.M,Schmidt M.A

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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2. Microflow devices and systems;Shoji;J. Micromech. Microeng.,1994

3. piezoelectric micropump based on micromachining of silicon;van Lintel;Sens. Actuators,1988

4. Integrated flow-regulated silicon micropump;Gasss;Sens. Actuators A,1994

5. The dynamic micropump driven with a screen printed PZT actuator;Koch;J. Micromech. Microeng.,1998

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