Actuation of resonant MEMS using short pulsed forces-Reference-Cited by-同舟云学术

Actuation of resonant MEMS using short pulsed forces

Published:2004-09 Issue:1 Volume:115 Page:118-125
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Colinet Éric,Juillard Jérôme,Guessab Sylvie,Kielbasa Richard

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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3. S. Sung, J.G. Lee, T. Kang, J.W. Song, Development of a tunable resonant accelerometer with self-sustained oscillation loop, National Aerospace and Electronics Conference, 2000. NAECON 2000. Proceedings of the IEEE 2000, 10–12 Oct. 2000.

4. Simple resonating microstructures for gas pressure measurement;Browns;J. Micromech. Microeng.,2002

5. N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, in: Proceedings of the IEEE, vol. 86, 1998.

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