Author:
Yin Yonggang,Fang Zhengxiang,Han Fengtian,Yan Bin,Dong Jingxin,Wu Qiuping
Funder
National Natural Science Foundation of China
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference25 articles.
1. MEMS inertial sensors: a tutorial overview;Shaeffer;IEEE Commun. Mag.,2013
2. MEMS (micro-electro-mechanical Systems) for Automotive and Consumer Electronics, Chips, 2020;Marek,2011
3. MEMS-based 3D accelerometers for land seismic acquisition: is it time?;Mougenot;Lead. Edge,2004
4. A vacuum packaged surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002
5. Inertial-grade in-plane resonant silicon accelerometer;Seok;Electron. Lett.,2006
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