CMOS integrated tactile sensor array by porous Si bulk micromachining-Reference-Cited by-同舟云学术

CMOS integrated tactile sensor array by porous Si bulk micromachining

Published:2008-03 Issue:1 Volume:142 Page:192-195
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Ádám Mária,Mohácsy Tibor,Jónás Péter,Dücső Csaba,Vázsonyi Éva,Bársony István

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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2. A surface micromachined microtactile sensor array;Gray,1996

3. A traction stress sensor array for use in high-resolution robotic tactile imaging;Kane;J. Microelectromech. Syst.,2000

4. G. Vásárhelyi, M. Ádám, É. Vázsonyi, I. Bársony, C. Dücső, Effects of the elastic cover on tactile-sensor arrays, in: Proceedings of the XIX EUROSENSORS Conference, Barcelona, Sept. 12-14, 2005, CD ROM. Sens. Actuators A 132 (2006) 245–251.

5. Characterization of an integrable single-crystalline 3-d tactile sensor;Vásárhelyi;IEEE Sens. J.,2006

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