Microfabrication of fine-pitch high aspect ratio Faraday cup arrays in silicon-Reference-Cited by-同舟云学术

Microfabrication of fine-pitch high aspect ratio Faraday cup arrays in silicon

Published:2007-07 Issue:2 Volume:137 Page:296-301
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Bower Christopher A.,Gilchrist Kristin H.,Lueck Matthew R.,Stoner Brian R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. The development of a micro-Faraday array for ion detection;Knight;Int. J. Mass Spectrom.,2002

2. Micromachined Faraday cup array using deep reactive ion etching;Darling;Sens. Actuators A,2002

3. Faraday cup detector array with electronic multiplexing for multichannel mass spectrometry;Scheidemann;J. Vac. Sci. Technol. A,2002

4. Mass spectrum measurement using a one-dimensional focal plane detector;Birkinshaw;Int. J. Mass Spectrom.,2002

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