Author:
Li Tingyu,Li Jinhui,Zhong Ao,Han Fei,Sun Rong,Wong Ching-Ping,Niu Fangfang,Zhang Guoping,Jin Yufeng
Funder
NSFC-Shenzhen Robot Jointed Funding
TSV 3D Integrated Micro/Nanosystem Lab
NSFC-Guangdong Jointed Funding
National Natural Science Foundation of China
China Postdoctoral Science Foundation
National Key R&D Project from Minister of Science and Technology of China
Science and Technology Service Network Initiative of Chinese Academy of Sciences
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Cited by
79 articles.
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