Static and dynamic performance of bistable MEMS membranes

Author:

Dorfmeister M.,Schneider M.ORCID,Schmid U.

Funder

COMET K1 centre ASSIC Austrian Smart Systems Integration Research Center

BMVIT, BMWFW

federal provinces of Carinthia and Styria

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference30 articles.

1. Dynamical switching of an electromagnetically driven compliant bistable mechanism;Wang;Sens. Actuators Phys.,2009

2. A curved-beam bistable mechanism;Qiu;J. Microelectromech. Syst.,2004

3. A bulk-micromachined bistable relay with U-shaped thermal actuators;Qiu;J. Microelectromech. Syst.,2005

4. A bistable microrelay based on two-segment multimorph cantilever actuators;Sun;Proc. MEMS 98 IEEE Elev. Annu. Int. Workshop Micro Electro Mech. Syst. Investig. Micro Struct. Sens. Actuators Mach. Syst. Cat No98CH36176,1998

5. A high-current electrothermal bistable MEMS relay;Qui;IEEE Sixt. Annu. Int. Conf. Micro Electro Mech. Syst. 2003 MEMS-03 Kyoto,2003

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