Fabrication of a vertical reflow microlens with silylation technology

Author:

Yang Chih-Chao,Huang Yun-Hsun,Peng Te-Chin,Wu Meng-Chyi,Ho Chong-Long,Hong Chao-Chi,Liu I-Ming,Tsai Yao-Tsong

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference9 articles.

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2. C. Morgan, I. White, R. Penty, S. Yu, Wavelength filters using two dimensional integrated optics, in: IEEE/LEOS Workshop on Firer and Optical Passive Components 2002, vol. 1, p. 51.

3. Microfabricated hinges;Pister;Sensor Actuator A,1992

4. Focusing characteristics of a wide-striped laser diode integrated with a microlens;Shimada;J. Lightwave Technol.,1994

5. Out-of-plane polymer refractive microlens fabricated based on direct lithography of SU-8;Yang;Sensor Actuator A,2004

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Fabrication of gapless dual-curvature microlens as a diffuser for a LED package;Sensors and Actuators A: Physical;2009-03

2. Study of micro-lens array by reflow process;Journal of Modern Optics;2008-10-10

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