Development of various designs of low-power, MEMS valves for fluidic applications-Reference-Cited by-同舟云学术

Development of various designs of low-power, MEMS valves for fluidic applications

Published:2007-05 Issue:1 Volume:136 Page:374-384
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Cardenas-Valencia A.M.,Dlutowski J.,Bumgarner J.,Munoz C.,Wang W.,Popuri R.,Langebrake L.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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