Design of smart drivers for electrostatic MEMS switches-Reference-Cited by-同舟云学术

Design of smart drivers for electrostatic MEMS switches

Published:2011-06 Issue:2 Volume:167 Page:422-432
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Dumas Norbert,Trigona Carlo,Pons Patrick,Latorre Laurent,Nouet Pascal

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

1. A comparison between RF MEMS switches and semiconductor switches;Grant,2004

2. Robustness optimization of MEMS-based reflectarray phase-shifting cells;Salti;EuCAP,2009

3. MEMS breakdown effects on the radiation of a MEMS based reconfigurable reflectarray;Salti;EuCAP’09, Berlin,2009

4. Evolution of a CMOS based lateral high voltage technology concept;Knaipp;Microelectron. J.,2006

5. Towards a health monitor for system in package with MEMS functionality;Dumas,2006

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