Eddy current displacement sensor with ultrahigh resolution obtained through the noise suppression of excitation voltage

Author:

Zhao Guo Feng,Ying Jin,Wu Lei,Feng Zhi Hua

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference21 articles.

1. A review of nanometer resolution position sensors: operation and performance;Fleming;Sens. Actuators A Phys.,2013

2. Measuring in the subnanometer range: capacitive and eddy current nanodisplacement sensors;Nihtianov;IEEE Ind. Electron. Mag.,2014

3. Difference between capacitive and eddy current sensors;Precision,2009

4. A 19.8-mW Eddy-current displacement sensor interface with sub-nanometer resolution;Chaturvedi;IEEE J. Solid-State Circuits,2018

5. Low-Power High-Performance Integrated Interface for Eddy-Current Displacement Sensors;Nabavi,2011

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