Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses-Reference-Cited by-同舟云学术

Pressure nonlinearity of micromachined piezoresistive pressure sensors with thin diaphragms under high residual stresses

Published:2008-09 Issue:1 Volume:147 Page:332-339
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Albert Chiou J.,Chen Steven

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

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