Author:
Zhou Lingfeng,Chen Zhiming,Cheng Jin,Chen Qiao,Ding Yingtao,Xie Huikai
Funder
National Natural Science Foundation of China
111 project of China
US National Science Foundation
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference17 articles.
1. Thermally actuated CMOS micromirrors;Buhler;Sens. Actuator A: Phys.,1995
2. Optical Microscanners and Microspectrometers Using Thermal Bimorph Actuators Dordrecht;Lammel,2002
3. Endoscopic optical coherence tomographic imaging with a CMOS-MEMS micromirror;Xie;Sens. Actuator A: Phys.,2003
4. An electrothermal tip–tilt–piston micromirror based on folded dual S-shaped bimorphs;Jia;J. Microelectromech. Syst.,2009
5. A mirror-tilt-insensitive Fourier transform spectrometer based on a large vertical displacement micromirror with dual reflective surface;Wu,2009
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