Author:
Vijayasai Ashwin P.,Sivakumar Ganapathy,Mulsow Matthew,Lacouture Shelby,Holness Alex,Dallas Tim E.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference39 articles.
1. Micromirror arrays fabricated by flip-chip assembly;Michalicek;Proc. SPIE,1999
2. Parallel assembly of high aspect ratio microstructures;Feddema;Proc. SPIE,1999
3. A tutorial on visual servo control;Hutchinson;IEEE Trans. Robot. Autom.,1996
4. Trends in micromechanics: micron machinations;Stix;Sci. Am.,1992
5. Rotating out-of-plane micromirror;Oak;J. Microelectromech. Syst.,2010
Cited by
4 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献