Shrinking design of a MEMS optical scanner having four torsion beams and arms

Author:

Iseki Takayuki,Okumura Mikio,Sugawara Takashi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

1. Torsional MEMS scanner design for high-resolution display systems;Urey;Proc. SPIE,2002

2. Performance of a biaxial MEMS-based scanner for microdisplay applications;Wine,2000

3. Optical characterization of high speed scanning micromirrors with vertical combdrives;Wada;Jpn. J. Appl. Phys.,2002

4. Eye-type scanning mirror with dual vertical combs for laser display;Ko;Sens. Actuators A: Phys.,2006

5. A flat high frequency scanning micromirror;Conant,2000

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