Author:
Shikida M.,Yamazaki Y.,Yoshikawa K.,Sato Kazuo
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. A micromachined flow shear-stress sensor based on thermal transfer principle;Liu;Journal of Microelectromechanical Systems,1999
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