Highly sensitive MEMS magnetic field sensors with integrated powder-based permanent magnets-Reference-Cited by-同舟云学术

Highly sensitive MEMS magnetic field sensors with integrated powder-based permanent magnets

Published:2019-10 Issue: Volume:297 Page:111560
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Niekiel Florian,Su Jingxiang,Bodduluri Mani Teja,Lisec Thomas,Blohm Lars,Pieper Isa,Wagner Bernhard,Lofink Fabian

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference33 articles.

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3. A MEMS AC current sensor for residential and commercial electricity end-use monitoring;Leland;J. Micromech. Microeng.,2009

4. A new MEMS sensor for AC electric current;Leland,2010

5. A MEMS silicon-based piezoelectric AC current sensor;Olszewski;Proc. Eng.,2014

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