Application of optimal and robust design methods to a MEMS accelerometer-Reference-Cited by-同舟云学术

Application of optimal and robust design methods to a MEMS accelerometer

Published:2008-03 Issue:1 Volume:142 Page:88-96
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Coultate John K.,Fox Colin H.J.,McWilliam Stewart,Malvern Alan R.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. IEEE Standard for Inertial Sensor Technology, IEEE Std. 528-2001, New York, 2001.

2. Multi-objective optimization of a MEMS accelerometer;Coultate,2005

3. Optimization and robust design of a MEMS accelerometer;Coultate,2006

4. Applied Optimization with Matlab Programming;Venkataraman,2002

5. Microsystem Design;Senturia,2001

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