Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators-Reference-Cited by-同舟云学术

Scanning electron microscopy for vacuum quality factor measurement of small-size MEMS resonators

Published:2008-07 Issue: Volume:145-146 Page:187-193
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Gilles J.P.,Megherbi S.,Raynaud G.,Parrain F.,Mathias H.,Leroux X.,Bosseboeuf A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference18 articles.

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3. Optical measurement methods to study dynamic behavior in MEMS;Rembe,2001

4. Application of time-resolved scanning electron microscopy to the analysis of the motion of MEMS structures;Ogo;J. Vac. Sci. Technol. B,1996

5. In-plane motion characterization of MEMS resonators using stroboscopic scanning electron microscopy;Wong;J. Sens. Actuator A,2007

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