Funder
National Natural Science Foundation of China
Program for Changjiang Scholars and Innovative Research Team
Beijing Natural Science Foundation
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference20 articles.
1. A micromachined pressure/flow-sensor;Oosterbroek;Sens. Actuators A,1999
2. A switched-capacitor interface for capacitive pressure sensors;Yamada;IEEE Trans. Instrum. Meas.,1992
3. Micro-electro-mechanical-systems (MEMS) and fluid flows;Ho;Ann. Rev. Fluid Mech.,1998
4. Ultra-small micro pressure sensor chip design and fabrication featuring high-sensitivity and good-linearity;Zheng;Microsyst. Technol.,2014
5. Perforated diaphragms employed piezoresistive MEMS pressure sensor for sensitivity enhancement in gas flow measurement;Rajavelu;Flow Meas. Instrum.,2014
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献