A monolithic fabrication process for a micro-flow heat transfer channel suspended over an air layer with arrays of micro-sensors and heaters-Reference-Cited by-同舟云学术

A monolithic fabrication process for a micro-flow heat transfer channel suspended over an air layer with arrays of micro-sensors and heaters

Published:2003-11 Issue:1-3 Volume:108 Page:81-85
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chen H.R.,Gau C.,Dai B.T.,Tsai M.S.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Gaseous slip flow in long micro-channels;Arkilic;J. MEMS,1997

2. Monatomic and polyatomic gas flow through uniform micro-channels;Shih;J. MEMS, ASME, DSC,1996

3. S. Wu, J. Mai, Y. Zohar, Y.C. Tai, C.M. Ho, A suspended micro-channel with integrated temperature sensors for high-pressure flow studies, in: Proceedings of The 11th Annual International Workshop on MEMS ’98, 1998, pp. 87–92.

4. Gas and liguid flow in small channels;Pfahler;Micromech. Sens. Actuators Syst. ASME, DSC,1991

5. Liquid transport in micro and submicron channels;Pfahler;Sens. Actuators,1990

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