Author:
You S.Z.,Long Y.F.,Xu Y.S.,Zhu Z.Q.,Shi Y.L.,Lai Z.S.,Li Z.F.,Lu W.,Li A.Z.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference7 articles.
1. Micromachined microwave transmission lines in CMOS technology;Milanvic;IEEE Trans. Microwave Theory Tech.,1997
2. High-performance planar inductor on thick oxidized porous silicon (OPS) substrate;Nam;IEEE Microwave and Guided Wave Lett.,1997
3. Spiral inductors on Si p/p+ substrates with resonant frequency of 20 GHz;Kim;IEEE Electron Device Lett.,2001
4. Z. Zhu, Y. Shi, Y. Long, P. Xin, Z. Lai, Improved microwave performance on low-resistivity Si substrates by introducing an oxidized porous Si interlayer, micromachining and microfabrication process technology VII, Proc. SPIE 4557 (2001) 447–452.
5. O. Bisi, et al., Surf. Sci. Rep. 38 (2000) 1–126.
Cited by
14 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. RF Electrical Isolation with Porous Silicon;Handbook of Porous Silicon;2018
2. RF Electrical Isolation with Porous Silicon;Handbook of Porous Silicon;2017
3. Electrical Isolation Applications of PSi in Microelectronics;Porous Silicon: From Formation to Applications: Optoelectronics, Microelectronics, and Energy Technology Applications, Volume Three;2016-01-07
4. Porous silicon for electrical isolation in radio frequency devices: A review;Applied Physics Reviews;2014-03
5. RF Electrical Isolation with Porous Silicon;Handbook of Porous Silicon;2014