Micro-mechanical switch array for meso-scale actuation-Reference-Cited by-同舟云学术

Micro-mechanical switch array for meso-scale actuation

Published:2005-05 Issue:1 Volume:121 Page:282-293
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Enikov Eniko T.,Lazarov Kalin V.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference28 articles.

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5. The black silicon method V: a study of the fabrication of movable structures for micro electromechanical systems;de Boer,1995

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