A hybrid-assembled MEMS Fabry-Pérot wavelength tunable filter-Reference-Cited by-同舟云学术

A hybrid-assembled MEMS Fabry-Pérot wavelength tunable filter

Published:2008-07 Issue: Volume:145-146 Page:116-122
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Yamanoi Toshio,Endo Takashi,Toshiyoshi Hiroshi

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference17 articles.

1. Opportunities and challenges for MEMS in lightwave communications;Lin;IEEE J. Select. Topics Quant. Elec.,2002

2. Micromechanical fiber-optic attenuator with 3 mu-s response;Ford;J. Lightwave. Tech.,1998

3. Bulk-microimachined tunable Fabry-Pérot microinterferometer for the visible spectral range;Correia;Sens. Actuators,1999

4. Microactuated slider-based tunable filters for optical fiber transmission;Tixier,1999

5. An NEC Co. Japanese patent pending, P2003-101138A.

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Tunable Fabry-Perot Interferometer Designed for Far-Infrared Wavelength by Utilizing Electromagnetic Force;Sensors;2018-08-06

2. MEMS optical interferometry-based pressure sensor using elastomer nanosheet developed by dry transfer technique;Japanese Journal of Applied Physics;2017-12-08

3. Nanoporous anodic aluminum oxide as a promising material for the electrostatically-controlled thin film interference filter;Journal of Micromechanics and Microengineering;2015-01-15

4. Line width analysis of a tunable optical filter based on free-space optics;Optik;2014-11

5. Surface stress sensor using MEMS-based Fabry–Perot interferometer for label-free biosensing;Sensors and Actuators B: Chemical;2013-11