Design and analysis of a vertically moving voice coil motor with gravity compensation for semiconductor equipment-Reference-Cited by-同舟云学术

Design and analysis of a vertically moving voice coil motor with gravity compensation for semiconductor equipment

Published:2022-09 Issue: Volume:344 Page:113735
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Kyung-min

Funder

Chungnam National University

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. Development and analysis of a bridge-lever-type displacement amplifier based on hybrid flexure hinges;Dong;Precis Eng.,2018

4. A six-degree-of-freedom magnetic levitation fine stage for a high-precision and high-acceleration dual-servo stage;Kim;Smart Mater. Struct.,2015

5. Design of a six-degree-of-freedom motion fine stage driven by voice coil motors with flexural guides;Jeong J-h;Int J. Precis Eng. Manuf.,2015

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