Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel-Reference-Cited by-同舟云学术

Solid micromechanical valves fabricated with in situ UV-LIGA assembled nickel

Published:2006-01 Issue:1 Volume:126 Page:187-193
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Bo,Chen Quanfang

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

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5. Micromachined Transducer Sourcebook;Kovacs,1998

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