Deep UV pulsed laser monitoring by CVD diamond sensors

Author:

Mazzeo Giovanni,Salvatori Stefano,Rossi Maria Cristina,Conte Gennaro,Castex Marie-Claude

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. S. Han, L.S. Pan, D.R. Kania, Diamond: electronic properties and applications, in: L.S. Pan, D.R. Kania (Eds.), Kluwer Press, Boston, 1995.

2. CVD diamond detectors for radiation pulse characterization;Foulon;Nucl. Instr. Methods Phys. Res. A,1996

3. S. Salvatori, M.C. Rossi, F. Galluzzi, D. Riedel, Transient photoresponse of CVD diamond-based detectors in the time domain 10−9–103s, M.C. Castex, Diamond Relat. Mater. 8 (1999) 871.

4. Diamond photodetectors for next generation 157-nm deep-UV photolithography tools;Whitfield;Diamond Relat. Mater.,2001

5. Bulk photoconductivity of CVD diamond films for UV and XUV detection;Lefeuvre;Diamond Relat. Mater.,2003

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