Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air

Author:

Trusov Alexander A.,Schofield Adam R.,Shkel Andrei M.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference25 articles.

1. Type I and Type II micromachined vibratory gyroscopes;Shkel,2006

2. Error sources in in-plane silicon tuning-fork MEMS gyroscopes;Weinberg;Journal of Microelectromechanical Systems,2006

3. Micromachined inertial sensors;Yazdi;Proceedings of the IEEE,1998

4. Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator;Acar;IEEE Journal of Microelectromechanical Systems,2006

5. A.R. Schofield, A.A. Trusov, A.M. Shkel, Effects of operational frequency scaling in multi-degree of freedom MEMS gyroscopes, IEEE Sensors Journal 8 (10) (2008) 1672–1680.

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