Mitigation of MEMS switch contact bouncing: Effectiveness of dual pulse actuation waveforms and robustness against variations in switch and waveform parameters

Author:

Wong Wallace S.H.,Lai C.H.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference22 articles.

1. Low-actuation voltage RF MEMS shunt switch with cold switching lifetime of seven billion cycles;Chan;Journal of Microelectromechanical Systems,2003

2. Modeling and characterization of dielectric-charging effects in RF MEMS capacitive switches;Yuan;IEEE MTT-S International Microwave Symposium Digest,2005

3. A soft-landing waveform for actuation of a single-pole single-throw ohmic RF MEMS switch;Czaplewski;Journal of Microelectromechanical Systems,2006

4. A simple learning control to eliminate RF-MEMS switch bounce;Blecke;Journal of Microelectromechanical Systems,2009

5. Longer MEMS switch lifetime using novel dual-pulse actuation voltage;Wong;IEEE Transactions on Device and Materials Reliability,2009

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