Author:
Chiou J. Albert,Chen Steven
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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5. Thermal hysteresis of MEMS pressure sensors;Chiou;IEEE/ASME J. Microelectromech. Sys.,2005
Cited by
13 articles.
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