Design, fabrication and calibration of a high-G MEMS accelerometer-Reference-Cited by-同舟云学术

Design, fabrication and calibration of a high-G MEMS accelerometer

Published:2018-08 Issue: Volume:279 Page:733-742
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Shi Yunbo,Zhao Yongqi,Feng Hengzhen,Cao Huiliang,Tang Jun,Li Jie,Zhao Rui,Liu Jun

Funder

National Natural Science Foundation of China

Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province

Shanxi Scholarship Council of China

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Micromachined high-g accelerometers: a review;Narasimhan;J. Micromech. Microeng.,2015

2. Proven sensor performance for emerging shock environment;Bateman;Sound Vibr.,2014

3. Design, fabrication and characterization of high performance SOI MEMS piezoresistive accelerometers;Roy;Microsyst. Technol. Micro Nano Syst.-Inf. Storage Process. Syst.,2015

4. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures;Ravi Sankar;Microsyst. Technol. Micro Nano Syst.-Inf. Storage Process. Syst.,2012

5. Design, simulation and fabrication of triaxial MEMS High shock accelerometer;Zhang;J. Nanosci. Nanotechnol.,2015

Cited by 38 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Integrated package and calibration of high-g MEMS ASIC acceleration sensor;Measurement;2025-01

2. Development of a MEMS Piezoresistive High-g Accelerometer with a Cross-Center Block Structure and Reliable Electrode;Sensors;2024-08-27

3. Failure behavior of tantalum electrolytic capacitors under extreme dynamic impact: Mechanical–electrical model and microscale characterization;Nanotechnology and Precision Engineering;2024-06-05

4. Sensitivity Matrix Calibration of Triaxial High-G Accelerometer Based on Triaxial Shock Calibration Device;IEEE Sensors Journal;2024-04-01

5. Study on the Equivalent Impact Method of Long/Short Pulsewidth Loading Based on Cumulative Energy;IEEE Transactions on Instrumentation and Measurement;2024