Author:
Yoshida Shinya,Hanzawa Hiroaki,Wasa Kiyotaka,Tanaka Shuji
Funder
MST, the Asashi Glass Foundation
Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT)
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference39 articles.
1. Development of a PZT MEMS switch architecture for low-power digital applications;Proie;J. Microelectromech. Syst.,2011
2. Wafer-level transfer technologies for PZT-based RF MEMS switches;Guerre;J. Microelectromech. Syst.,2010
3. A 3-axis PZT-based MEMS gyroscope in 0.18μm CMOS;Ahmed;ESSCIRC IEEE,2012
4. Preparation of (001) oriented Pb(Zr Ti)O3 thin films and their piezoelectric applications;Fujii;IEEE Int. Symp. Appl. Ferroelectr.,2007
5. Hydrodynamic responses of a piezoelectric driven MEMS inkjet print-head;Kim;Sens. Actuators A: Phys.,2014
Cited by
13 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献