Development and test of MEMS accelerometer with self-sustatined oscillation loop

Author:

Sung Sangkyung,Lee Jang Gyu,Kang Taesam

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. A novel resonant accelerometer variable electrostatic stiffness type;Lee;Proc. Transducers,1999

2. B.L. Lee, C.H. Oh, S. Lee, Y.S. Oh, K. Chun, A vacuum packaged differential resonant accelerometer using gap sensitive electrostatic stiffness changing effect, in: Proceedings of the 13th International Conference on Micro Electro Mechanical Systems, 2000, pp. 352–357.

3. S. Sung, J.G. Lee, T. Kang, Development of a tunable resonant accelerometer with self-sustained oscillation loop, in: Proceedings of the IEEE NAECON, 2000, pp. 354–361.

4. S. Sung, J.G. Lee, T. Kang, J.W. Song, Design and analysis of nonlinear feedback loop for a resonant accelerometer, in: Proceedings of the European Control Conference 01, 2001, pp. 1906–1911.

5. Nonlinear oscillations in magnetic bearing systems;Mohamed;IEEE Trans. Automatic Contr.,1993

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