Compact micro-Pirani vacuum sensor based on series diodes without heating structure-Reference-Cited by-同舟云学术

Compact micro-Pirani vacuum sensor based on series diodes without heating structure

Published:2019-04 Issue: Volume:289 Page:11-18
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Wei Debo,Fu Jianyu,Liu Ruiwen,Hou Ying,Liu Chao,Wang Weibing,Chen Dapeng

Funder

National Natural Science Foundation of China

Technological Innovation Project of Instrument Function Development, Chinese Academy of Sciences

Hi-Tech Research Development Program of China

Chinese Academy of Sciences-Peking University Pioneer Cooperation Team

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. Pirani vacuum gauges using silicon-on-glass and dissolved-wafer processes for the characterization of MEMS vacuum packaging;Topalli;IEEE Sens. J.,2009

4. The 14th International Conference on Solid-State Sensors, Actuators and Microsystems, In-Situ Pressure Measurements of Encapsulted Gyroscopes;Simon,2007

5. Surface micromachined resonant accelerometer;Seshia;J. Microelectromech. Syst.,2002

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