Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties-Reference-Cited by-同舟云学术

Development of a single-chip elasticity sensor using MEMS-based piezoresistive cantilevers with different tactile properties

Published:2019-01 Issue: Volume:285 Page:362-368
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Nguyen Thanh-Vinh,Tanii Ryota,Takahata Tomoyuki^ORCID,Shimoyama Isao

Funder

JSPS Grant-in-Aid for Young Scientists

Tateisi Science and Technology Foundation

Advanced Machining Technology & Development Association

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference27 articles.

1. Tactile sensing for dexterous in-hand manipulation in robotics—a review;Yousef;Sens. Actuators A Phys.,2011

2. Tactile sensors for robotic applications;Girão;Measurement,2013

3. Development of the tactile sensor system of a human-interactive robot;Mukai;Ieee Trans. Robot.,2008

4. Force/tactile sensor for robotic applications;De Maria;Sens. Actuators A Phys.,2012

5. Bioinspired 3-D tactile sensor for minimally invasive surgery;Hu;J. Microelectromech. Syst.,2010

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