Curled micro-cantilevers using benzocyclobutene polymer and Mo for wafer level probing-Reference-Cited by-同舟云学术

Curled micro-cantilevers using benzocyclobutene polymer and Mo for wafer level probing

Published:2005-06 Issue:2 Volume:121 Page:472-479
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Lee Si-Hyung,Kim Bruce C.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference16 articles.

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3. Fabrication of micro IC probe for LSI testing;Ito;Sens. Actuators A,2000

4. Flexible micro-spring interconnects for high performance probing;Haemer,2000

5. Stress, strain, and microstructure of sputter-deposited Mo thin films;Vink;J. Appl. Phys.,1991

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