High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters-Reference-Cited by-同舟云学术

High-κ dielectrically transduced MEMS thickness shear mode resonators and tunable channel-select RF filters

Published:2007-05 Issue:2 Volume:136 Page:527-539
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Chandrahalim Hengky,Weinstein Dana,Cheow Lih Feng,Bhave Sunil A.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference14 articles.

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4. Vertical capacitive SiBARs;Pourkamali,2005

5. Vibrating micromechanical resonators with solid dielectric capacitive-transducer ‘gaps’;Lin,2005

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