Interdigital capacitive strain gauges fabricated by direct-write thermal spray and ultrafast laser micromachining

Author:

Li Jinggao,Longtin Jon P.,Tankiewicz Szymon,Gouldstone Andrew,Sampath Sanjay

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference13 articles.

1. Capacitive gauge for determining the dielectric properties of gases and liquids;Minaev;Meas. Tech. USSR,1987

2. Measurement of displacement and strain by capacitance methods;Carter;Proc. Inst. Mech. Eng.,1945

3. Capacitive gauge for accurate measurement of high pressures;Andeen;Rev. Sci. Instrum.,1971

4. Evaluation of a capacitive strain measuring system for use to 1500°F;Harting;ISA Trans.,1976

5. CAD models for multilayered substrate interdigitral capacitors;Gevorigan;IEEE Trans. Microwave Theory Tech.,1996

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