Micro motion of a piezoelectric linear actuator driven by liquid interacting with Rayleigh surface acoustic wave

Author:

Behera BasudebaORCID

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference10 articles.

1. Recent developments of piezoelectric motors with diverse operating principles;Behera;ISSS J. Micro Smart Syst.,2017

2. Dual friction-drive SAW motor utilizing cylindrical shaft as external load driver;Behera;Ferroelectr. Lett. Sect.,2018

3. Design and investigation of a dual-friction drive based LiNbO3 piezoelectric actuator employing a cylindrical shaft as slider;Behera;IEEE Sens. J.,2019

4. Ultrasonic linear motor using surface acoustic waves;Kurosawa;IEEE Trans. Ultrason. Ferroelectr. Freq. Control,1996

5. A new manipulator based on surface acoustic wave streaming;Sano;IEEE Ultrasonics Symposium,1997

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