Electroplated Ni microcantilever probe with electrostatic actuation-Reference-Cited by-同舟云学术

Electroplated Ni microcantilever probe with electrostatic actuation

Published:2005-09 Issue: Volume:123-124 Page:490-496
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Itoh Toshihiro,Kawamura Shingo,Kataoka Kenichi,Suga Tadatomo

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference12 articles.

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5. A micromachined array probe card—characterization;Beiley;IEEE Trans. Compon. Packag. Manuf. Technol. Part B,1995

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