Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review-Reference-Cited by-同舟云学术

Stepping piezoelectric actuators with large working stroke for nano-positioning systems: A review

Published:2019-06 Issue: Volume:292 Page:39-51
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Li Jianping,Huang Hu^ORCID,Morita Takeshi

Funder

Zhejiang Provincial Natural Science Foundation of China

National Natural Science Foundation of China

Young Elite Scientists Sponsorship Program by CAST(YESS)

Research Funds for the Central Universities

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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3. Position estimation using linear hall sensors for permanent magnet linear motor systems;Kim;IEEE T. Ind. Electron.,2016

4. Sensorless position control with a hydraulic stepper drive—concept, compression modeling and experimental investigation;Gradl;Mechatronics,2016

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