Author:
Scheibner D.,Mehner J.,Reuter D.,Gessner T.,Dötzel W.
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
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4. Micromachined resonator for cavitation sensing;Peiner;Sens. Actuators A,1999
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